Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping.
作者： Chia-Yen Lee , Chung-Kang Kuo , Lung-Ming Fu , Yu-Ying Lin
DOI: 10.3390/MI12030299
关键词:
摘要: A magnetic field measurement system based on an array of Hall sensors is proposed. The are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist a P-type silicon substrate, dioxide isolation layer, phosphide-doped cross-shaped detection zone, gold signal leads. When placed within field, the interaction between local produced by working current external generates measurable voltage from which strength then derived. Four incorporating zones with identical aspect ratio (2.625) but different sizes (S, M, L, XL). For given current, sensitivities response times four devices found to be almost same. However, offset increases increasing size zone. 3 × assembled into 3D-printed frame used determine distributions single magnet group three magnets, respectively. results show that constructed 2D contour maps accurately reproduce both locations individual magnets fields around them.
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