Optical sensing device for use in a medical device
作者： Paul F. Gerrish , Jonathan L. Kuhn , Timothy J. Davis , Robert M. Ecker , James D. Reinke
DOI:
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摘要: A reflectance-type optical sensor includes one or more photodiodes formed in a semiconductor substrate. well having sidewalls and bottom is the top surface of substrate, reflective layer on bottom. light-emitting diode (LED) mounted well, so that light emitted laterally rearwardly from LED strikes redirected direction generally perpendicular to The can be fabricated using microelectromechanical systems (MEMS) fabrication techniques.
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