Lithography performance and environmental compatibility of PFOS-free photoacid generators
作者： Wenjie Sun , Youngjin Cho , Marie Krysak , Christine Y Ouyang , Reyes Sierra-Alvarez
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摘要: Photoacid generators (PAGs) with environmentally friendly cores and partially fluorinated sulfonate salts have been synthesized studied. The were based on naturally occurring compounds su...
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