Method for preparing optical grating on surface of test piece

摘要: The invention discloses a method for preparing an optical grating on the surface of test piece. comprises following steps that micro-scale piece is provided; processing conducted piece; placed below focus two-beam system which conducts microarea positioning by adoption electron beam; lattice structure sedimentation ion beam, and formed. can be used deformation sensing element-high-density cloud pattern micro-nano film, has little damage to prepare different-frequency structures suitable different measuring ranges, conduct real-time micro area piece, also gratings surfaces substrate materials. advantages being good in universality damage.