Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies

作者: J.W. Digby , C.E. McIntosh , G.M. Parkhurst , B.M. Towlson , S. Hadjiloucas

DOI: 10.1109/22.859472

关键词:

摘要: … micromachined waveguides using a lithographic technique. The fundamental problem with -parameter measurements of these micromachined waveguides … micromachined waveguide …

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