作者: J.W. Digby , C.E. McIntosh , G.M. Parkhurst , B.M. Towlson , S. Hadjiloucas
DOI: 10.1109/22.859472
关键词:
摘要: … micromachined waveguides using a lithographic technique. The fundamental problem with -parameter measurements of these micromachined waveguides … micromachined waveguide …