Production of polycrystalline silicon from silane pyrolysis: A review of fines formation
作者： Pan Zhang , Jihai Duan , Guanghui Chen , Jianlong Li , Weiwen Wang
DOI: 10.1016/J.SOLENER.2017.12.031
关键词:
摘要: … This paper discusses the fines formation during the pyrolysis of … pyrolysis and the reaction pathways. Then, Section 4 reviews the mechanisms of fines formation during silane pyrolysis. …
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