Automatic wafer identification system and method

摘要: A method and system for the identification of semiconductor wafers. code in form selected recognition symbols is inscribed circuit-free regions or kerf areas wafer. In a separate operation, complex spatial filters entire set are formed spaced locations on photographic medium. To detect whether particular symbol has been wafer, within wafer cross-correlated with The matching filter that produces spot light behind filter. photodetector associated each detects output when match occurs.