High Performance Matched-Mode Tuning Fork Gyroscope
作者： M.F. Zaman , A. Sharma , F. Ayazi
DOI: 10.1109/MEMSYS.2006.1627737
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摘要: This paper presents the perfect matched-mode operation of a type I non-degenerate z-axis tuning-fork gyroscope (ie, 0 Hz frequency split between high-Q drive and sense modes). The matched-mode tuning fork gyroscope (M 2-TFG) is fabricated on 50-µ m thick SOI substrate and displays an overall rate sensitivity of 24.2 mV/º/s. Allan Variance analysis of the mode-matched device demonstrates an angle random walk (ARW) of 0.045 º/√ hr and a measured bias instability of 0.96 º/hr. Temperature characterization of the M 2-TFG verifies …
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