Solid immersion lens moving device and microscope using the same

作者: Hiroshi Tanabe , Ikuo Arata

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摘要: A solid immersion lens moving device is provided with a first arm member 71 , to which connected holder 5 that supports 3 ; rotation source 72 rotates this within an X-Y plane substantially parallel observed object; second 73 holding and 74 having axis at position non-coaxial the of rotating plane. By enabling movement desired by two members need make component parts long in orthogonal X Y directions eliminated simple arrangement occupies small area provided. device, low cost realized while realizing compactness microscope equipped same are thereby realized.

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