An experimental study of a parallel‐plate radio‐frequency discharge: Measurements of the radiation temperature and electron density
作者： G. A. Hebner , J. T. Verdeyen , M. J. Kushner
DOI: 10.1063/1.341060
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摘要: Microwave diagnostic techniques have been used to measure the radiation temperature and electron density in parallel‐plate capacitively coupled radio‐frequency (2.5 MHz) discharges. Evidence is presented for existence importance of an energetic beam, produced by large cathode sheath voltage, which sustains excites plasma. The measured bulk electrons 500 K helium 800 argon. An upper limit on obtained N2 (1200 K) CF4 (3000 Measurements as a function electrode spacing show peak that consistent with theory ionization beam electrons. electric fields required carry rf current drift glow are low temperature. implications these measurements nature plasma‐sustaining mechanism. voltage distribution, electr...
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