The drive to miniaturization

作者: Paul S. Peercy

DOI: 10.1038/35023223

关键词:

摘要: Following the introduction of silicon-based integrated circuitry over three decades ago, integration density such circuits has doubled every 12 to 18 months: this observation is known as Moore's law. For historical trend continue, significant challenges need be overcome in several key technological areas. But for many these challenges, there are at present no solutions.

参考文章(3)
M. V. Fischetti, S. E. Laux, Performance degradation of small silicon devices caused by long-range Coulomb interactions Applied Physics Letters. ,vol. 76, pp. 2277- 2279 ,(2000) , 10.1063/1.126320
G.E. Moore, Cramming More Components Onto Integrated Circuits Proceedings of the IEEE. ,vol. 86, pp. 56- 59 ,(1998) , 10.1109/JPROC.1998.658762
R.H. Dennard, F.H. Gaensslen, Hwa-Nien Yu, V.L. Rideout, E. Bassous, A.R. LeBlanc, Design of ion-implanted MOSFET's with very small physical dimensions IEEE Journal of Solid-State Circuits. ,vol. 9, pp. 256- 268 ,(1974) , 10.1109/JSSC.1974.1050511