Integration of high-Q BAW resonators and filters above IC
作者： M. Dubois , C. Billard , C. Muller , G. Parat , P. Vincent
DOI: 10.1109/ISSCC.2005.1494034
关键词:
摘要: A double-lattice BAW filter with balanced input and output is designed a center frequency of 2.14GHz. The integrated directly above 0.25/spl mu/m BiCMOS RF IC. Insertion loss -3dB out-of-band rejection better than -50dB are achieved. An LNA comprising two broadband amplifiers one also presented.
sci-hub.se 参考文章(5)
F. Martin, P. Muralt, M.-A. Dubois, A. Pezous, Thickness dependence of the properties of highly c-axis textured AlN thin films Journal of Vacuum Science and Technology. ,vol. 22, pp. 361- 365 ,(2004) , 10.1116/1.1649343
Marc-Alexandre Dubois, Paul Muralt, Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering Journal of Applied Physics. ,vol. 89, pp. 6389- 6395 ,(2001) , 10.1063/1.1359162
R. Ruby, P. Bradley, J. Larson, Y. Oshmyansky, D. Figueredo, Ultra-miniature high-Q filters and duplexers using FBAR technology international solid-state circuits conference. pp. 120- 121 ,(2001) , 10.1109/ISSCC.2001.912569
K.M. Lakin, Thin Film Resonators and Filters internaltional ultrasonics symposium. ,vol. 2, pp. 895- 906 ,(1982) , 10.1109/ULTSYM.1999.849135
R. Aigner, J. Kaitila, J. Ella, L. Elbrecht, W. Nessler, M. Handtmann, T.-R. Herzog, S. Marksteiner, Bulk-acoustic-wave filters: performance optimization and volume manufacturing international microwave symposium. ,vol. 3, pp. 2001- 2004 ,(2003) , 10.1109/MWSYM.2003.1210552