Solid-state imaging element, and imaging device using it
作者： 円 西山 , Madoka Nishiyama
DOI:
关键词:
摘要: PROBLEM TO BE SOLVED: To detect a focal point with pixel having photoelectric conversion part divided into two, and to further improve detection accuracy. SOLUTION: This solid-state imaging element is provided plurality of two-dimensionally arranged pixels on substrate 51. Each partial 20H has first 42 second 43 respectively present in one-side region the other-side by division line plan view viewed from normal direction 51, subjecting incident light conversion. A space 91 formed interlayer films 56-58 51 along view. 71 between semiconductor constituting 43. COPYRIGHT: (C)2009,JPO&INPIT
lens.org 参考文章(5)
Akihiko Nagano, 明彦 長野, Imaging apparatus and system ,(2001)
Tetsuya Itano, Yuichiro Yamashita, 雄一郎 山下, 哲也 板野, Solid-state image sensing device and image sensing system ,(2001)
Naoki Okochi, 直紀 大河内, Satoshi Suzuki, 智 鈴木, Solid state imaging device and electronic camera using the same ,(2005)
Nobuaki Aoki, 信明 青木, Solid-state image pick up element and its manufacturing method ,(2000)
Rodrigues Rogerio G, Leblanc James Walter, Short Jonathan D, Possin George Edward, Zeman Gregory S, Li Wen, DETECTOR COMPRISING ELECTRICALLY ISOLATED PIXEL ,(2007)