Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices
作者： A Jourdain , P De Moor , K Baert , I De Wolf , H A C Tilmans
DOI: 10.1088/0960-1317/15/7/013
关键词:
摘要: … the BCB sealing ring and the bonding conditions. The leak rate of BCB-sealed cavities strongly depends on the BCB width… −11 mbar ls −1 are measured for large BCB widths (>800 µm), …
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