Apparatus for and method of source material delivery in a laser produced plasma EUV light source
作者： David Evans , Matthew Graham , Alexander I. Ershov
DOI:
关键词:
摘要: A device and method are disclosed in which gas is caused to flow parallel a of source material form shroud. The shroud may protect from being disrupted by cross gas. also limit heating physical through the passes accumulation on deforming plasma bubble formed during irradiation so that does not come too near for establishing an additional transverse cause contamination optic used collect light generated material.
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