Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products
作者： Kevin H-L Chau , Robert E Sulouff Jr , None
DOI: 10.1016/S0026-2692(98)00021-4
关键词:
摘要: … accomplishment to date in surface micromachining technology. The integrated approach … accelerometer product series as an example to review the integrated surface micromachining …
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sci-hub.se 参考文章(25)
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