Experimental studies of sputtering on zirconium analyzed using modified Roosandaal Sanders theory

摘要: Abstract : An ion optics system utilizing a wein filter velocity selector has been modeled and characterized for use as an source instrument to measure high resolution angular distributions of sputtered neutral atoms. Laser induced fluorescence detection techniques are used ground state first excited sputtering on polycrystalline zirconium foil using argon nitrogen sputter gases. The incident beam impact angle varied from 15 deg 75 measured surface normal the select N2+ N+ beams beam. experimental data gathered compared Roosandaal Sanders analytical theory along with xenon neon. reproduces near behavior but rapidly breaks down moves toward surface. Modifications equation introduce adjustable fitting parameters non-linear least squares these accomplished. results discussed relating physical constants based in Theory. Discrepancies addressed extensive discussion interaction. (MM)