Ion implantation in diamond for quantum information processing (QIP): doping and damaging
作者： R. Kalish
DOI: 10.1533/9780857096685.1.36
关键词:
摘要: Abstract: The creation of specific luminescent centers in semiconductors, particular the controlled nitrogen–vacancy (NV) diamond, relies heavily on ion implantation. Furthermore, formation vacancies and various photonic devices for manipulation transportation photons emitted by these rely bond breakage that accompanies In this chapter, we review physics related to slowing down ions stressing its implications implantation doping, introduction sacrificial graphitic regions diamond.
elsevier.com
sci-hub.se 参考文章(45)
David Saada, Joan Adler, R. Kalish, Transformation of Diamond (sp3) to Graphite (sp2) Bonds by Ion-Impact International Journal of Modern Physics C. ,vol. 09, pp. 61- 69 ,(1998) , 10.1142/S0129183198000066
S. Koizumi, M. Kamo, Y. Sato, H. Ozaki, T. Inuzuka, Growth and characterization of phosphorous doped {111} homoepitaxial diamond thin films Applied Physics Letters. ,vol. 71, pp. 1065- 1067 ,(1997) , 10.1063/1.119729
S. Prawer, R. Kalish, Ion-beam-induced transformation of diamond Physical Review B. ,vol. 51, pp. 15711- 15722 ,(1995) , 10.1103/PHYSREVB.51.15711
James F Ziegler, Matthias D Ziegler, Jochen P Biersack, SRIM : the stopping and range of ions in matter Published in <b>2008</b> in Chester Md) by SRIM. ,(2008)
James F. Ziegler, M.D. Ziegler, J.P. Biersack, SRIM – The stopping and range of ions in matter (2010) Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 268, pp. 1818- 1823 ,(2010) , 10.1016/J.NIMB.2010.02.091
Igor Aharonovich, Chunyuan Zhou, Alastair Stacey, François Treussart, Jean-François Roch, Steven Prawer, Formation of color centers in nanodiamonds by plasma assisted diffusion of impurities from the growth substrate Applied Physics Letters. ,vol. 93, pp. 243112- ,(2008) , 10.1063/1.3049606
A Reznik, C Uzan-Saguy, R Kalish, Effects of point defects on the electrical properties of doped diamond Diamond and Related Materials. ,vol. 9, pp. 1051- 1056 ,(2000) , 10.1016/S0925-9635(00)00225-9
Barbara A. Fairchild, Paolo Olivero, Sergey Rubanov, Andrew D. Greentree, Felix Waldermann, Robert A. Taylor, Ian Walmsley, Jason M. Smith, Shane Huntington, Brant C. Gibson, David N. Jamieson, Steven Prawer, Fabrication of Ultrathin Single‐Crystal Diamond Membranes Advanced Materials. ,vol. 20, pp. 4793- 4798 ,(2008) , 10.1002/ADMA.200801460
R. Kalish, T. Bernsteins, B. Shapiro, A. Talmi, A percolation theory approach to the implantation induced diamond to amorphous-carbon transition Radiation Effects and Defects in Solids. ,vol. 52, pp. 153- 168 ,(1980) , 10.1080/00337578008210028
N. A. Marks, N. C. Cooper, D. R. McKenzie, D. G. McCulloch, P. Bath, S. P. Russo, Comparison of density-functional, tight-binding, and empirical methods for the simulation of amorphous carbon Physical Review B. ,vol. 65, pp. 075411- ,(2002) , 10.1103/PHYSREVB.65.075411