Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

摘要: There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) sensing material, and thermal conductance insulation structure. Cytochrome c protein, having a high TCR, is good candidate infrared detection. We can use SU-8 photoresist structure, given its low conductance. In this study, we designed platform structure based on photoresist. fabricated an pixel recorded TCR new The was using exposure dose method. experimentally demonstrated values from 22%/K to 25.7%/K, measured noise 1.2 × 10−8 V2/Hz at 60 Hz. When bias current 2 μA, calculated voltage responsivity 1.16 105 V/W. This study presents kind microbolometer cytochrome protein top that does not require expensive vacuum deposition equipment.