Vanadium oxide thin films for optical readout-based thermal imager

作者: A.A. Odebowale , M. Abdel-Rahman , H. Albrithen

DOI: 10.1016/J.IJLEO.2019.163580

关键词:

摘要: Abstract In this study, optical characterization of vanadium oxide (VOx) thin film is performed using a variable angle spectroscopic ellipsometer (VASE). The at four different room temperatures, 25.5–28.5 °C, in steps 1 °C. best fitting results the ellipsometric parameters φ and Δ are obtained by GenOsc layer with Lorentz oscillator. Four thermo-optic coefficients (TOCs) from modelled data. TOC value least extinction coefficient chosen, which occurs 26.5 °C. effect on shifting Fabry-Perot cavity filter (FPCF) tuning frequency examined all designs (2, 4, 6 stacks) to determine sensitivity FPCF sensor scene temperature variations. We verify performance as long-wave infrared radiation absorber visible light band-pass filter. This designed have low thermal conductivity mechanical stress.

参考文章(12)
R.A. Wood, Chapter 3 Monolithic Silicon Microbolometer Arrays Semiconductors and Semimetals. ,vol. 47, pp. 43- 121 ,(1997) , 10.1016/S0080-8784(08)62689-7
Frank Niklaus, Christian Vieider, Henrik Jakobsen, MEMS-based uncooled infrared bolometer arrays: a review Conference on MEMS/MOEMS Technologies and Applications III San Jose, CA, NOV 12-14, 2007. ,vol. 6836, ,(2007) , 10.1117/12.755128
D. Saygin-Hinczewski, M. Hinczewski, I. Sorar, F.Z. Tepehan, G.G. Tepehan, Modeling the optical properties of WO3 and WO3–SiO2 thin films Solar Energy Materials and Solar Cells. ,vol. 92, pp. 821- 829 ,(2008) , 10.1016/J.SOLMAT.2008.01.021
A. S. Ferlauto, G. M. Ferreira, J. M. Pearce, C. R. Wronski, R. W. Collins, Xunming Deng, Gautam Ganguly, Analytical model for the optical functions of amorphous semiconductors from the near-infrared to ultraviolet: Applications in thin film photovoltaics Journal of Applied Physics. ,vol. 92, pp. 2424- 2436 ,(2002) , 10.1063/1.1497462
Alfred P. Marchetti, Terri L. Haskins, Ralph H. Young, Lewis J. Rothberg, Permanent polarization and charge distribution in organic light-emitting diodes (OLEDs): Insights from near-infrared charge-modulation spectroscopy of an operating OLED Journal of Applied Physics. ,vol. 115, pp. 114506- ,(2014) , 10.1063/1.4867779
Nickolay V. Lavrik, Michael J. Sepaniak, Panos G. Datskos, Cantilever transducers as a platform for chemical and biological sensors Review of Scientific Instruments. ,vol. 75, pp. 2229- 2253 ,(2004) , 10.1063/1.1763252
K. Schneider, Structural And Optical Properties Of VOx Thin Films Archives of Metallurgy and Materials. ,vol. 60, pp. 957- 961 ,(2015) , 10.1515/AMM-2015-0238