Study of Sb/SnO2 bi-layer films prepared by ion beam sputtering deposition technique
作者： Chun-Min Wang , Chun-Chieh Huang , Jui-Chao Kuo , Jow-Lay Huang
DOI: 10.1016/J.TSF.2014.02.107
关键词:
摘要: article i nfo Available online 14 March 2014 In the present work, bi-layer thin films of Sb/SnO2 were produced on unheated glass substrates using ion beam sputtering (IBS) technique without post annealing treatment. The thickness Sb layers was varied from 2 to 10 nm and deposited SnO2 having thicknesses 40 115 nm. effect studied morphological, electrical optical properties. resulted in lowering resistivity as well reducing transmittance. However, properties mainly influenced by due progressive transfer structures aggregate continuous films. show 1.4 × �3 Ω cm an transmittance 26% for film thickness.
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