Noncontact conductivity measuring instrument
作者： Yang Ju
DOI:
关键词:
摘要: The present invention relates to measurement of conductivity. A microwave oscillated by an oscillator using a Gunn diode is applied through isolator, circulator, and horn antenna silicon wafer. isolator used for reducing the standing wave influencing operation instrument. reflected received same antenna, detected detector connected outpufted in form voltage. produces output voltage proportional square amplitude electric field. Since from wafer absolute value reflectance, also reflectance. reflectance certain relationship with conductivity, conductivity can be determined.
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