作者: John L. Adamski , Richard H. Bossi , Clarence Lavere Gordon
DOI:
关键词:
摘要: A method and apparatus for measuring a structure. An x-ray system the structure are positioned relative to each other. The comprises gas source configured provide gas, laser emit beam, steering system, detector. is direct first portion of beam into such that an electron generated by interacting with second collimated formed. detector detect beam. emitted system.