Optical interference filter

摘要: In an optical interference filter having alternating sequence of low-refraction first layers and high-refraction second on a glass substrate, where the essentially comprise amorphous SiO2 are crystalline TiO2 metal oxide selected from group including ZrO2, HfO2 Ta2O5 cracking, delamination crystallographic phase transitions suppressed, even if number is high, material mixed comprising… 88 to 95 mol% 5 12 ZrO2,… HfO2, TiO2.ZrO2, TiO2.HfO2, TiO2.Nb2O5, TiO2.Ta2O5 Ta2O5.2TiO2,… mixtures or combinations these materials,… crystal structure corresponding which produced heat treatment at temperature between 700 1100 DEG C. The structures shown in X-ray diffraction diagrams. Fig. 2a shows diagram 18-layer containing Hf after production 900 C, I denotes intensity (in arbitrary units) 2 theta angle. …