Towards an integrated IR-absorption microsensor for the online monitoring of fluids

摘要: In industry, a vast variety of processes can be optimized by means online measurement chemical properties fluids in order to reduce costs for maintenance or increase productivity as well production quality. this contribution, we report on the design fully integrated infrared absorption sensor, which is capable determine investigating at selected distinct wavelengths mid-infrared region. For example, frequency scheduled lubrication oil, e.g., combustion engines, quality deteriorated oil has determined, been pilot application our development. Based results transmission spectroscopy, show that properly designed optical waveguide structure, sensitivity similar obtained used laboratory, achieved. To achieve highly sensitive element, planar mono-mode utilized requires an appropriate coupler couple light into waveguide. The employed grating couplers have modeled derive yielding desired sensor performance. As targeted wavelength located region, suitable source detector, respectively, fabricated thermal components. Finally, ongoing technological development establish required thin-film processes.