作者: L.D. Partain , L.M. Fraas , P.S. McLeod , J.A. Cape
DOI: 10.1016/0379-6787(87)90079-2
关键词:
摘要: Abstract III–V solar cells offer potential advantages in efficiency and cost for making photovoltaic power systems economic large-scale utility applications. Relatively safe manufacturing technologies have been developed to fabricate electronic devices but the scale involved has introduced new safety challengs. Gas source fabrication offers including ease of gas materials handling control. However, present such as metal-organic chemical vapor deposition (MOCVD) molecular beam epitaxy (MOMBE) involve significant injury from toxic used. This risk can be greatly reduced by advanced technology vacuum (VCE). MOCVD problems low utilization with large quantities effluent, fragile quartz components, cold chamber walls that rapidly build-up residues, no load lock personnel protection hydrogen explosions. However scaled up medium production levels cells. In contrast MOMBE rugged metal walls, locks higher some gases. But builds residues on surfaces it is not readily scaleable level volumes. VCE combines many best characteristics MBE. These include all materials, hot residue rates, outer an inherent scalability levels.