Micromachined accelerometer gyroscope

摘要: An integrated rate and acceleration sensor includes at least one accelerometer formed from a substantially planar silicon body. The micro-silicon (MSA) first frame proof mass suspended the by flexures. has an associated sensitive axis that is orthogonally disposed to axis. further structure for dithering or vibrating along dither perpendicularly both axes. second interdigitated electrodes. Finger portions of electrodes are exerting electrostatic force upon portion body in response oscillatory drive signal. plurality linear grooves therein, being parallel orientation with finger portions. A gyro (VAG) constructed micromachining techniques such momenta two MSAs balance another. symmetrical disposition masses tends MSAs, increases resonance amplification factor (Q).