Synthesis and properties of nanostructures formed by sputter deposition

摘要: Nanoscale grain structures can be created in many materials by high rate sputter deposition upon an appropriate substrate. By controlling the sputtering parameters of substrate temperature, rate, and bias, scale microstructure vary from amorphous to sizes typical conventionally treated material. The morphology size will also controlled post-deposition heat treatment, particularly treatment metastable phases. Examples are given nanostructural development sputter-deposited pure metals, stainless steel alloys, intermetallic compounds. Some properties these nanostructures such as microhardness yield strength have been evaluated shown a strong function size. structure nanolayered Cu-Mo composites produced discussed. Synthesis at low temperature using displacement reactions layered composite is demonstrated. 16 refs., 10 figs.