Vibration energy harvesting using highly (001)-oriented Pb(Zr,Ti)O3 thin film
作者： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
DOI: 10.1063/1.3406253
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摘要: Energy conversion from mechanical vibration into electric power was investigated using the piezoelectric Pb(Zr,Ti)O3 lead zirconate titanate (PZT) thin film with highly (001)-orientation. The d31 constant found to be as large −150 pC/N. generated voltage under acceleration of 45 m/s2 at 2450 Hz for PZT/Si cantilever exceeded 2 V and operation light emitting diode lighting demonstrated. average output 100 μW obtained impedance-matched load resistance 2.2 kΩ. density 50 μW/mm3 much larger than that conventional harvesters.
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