H-Shaped Multiple Linear Motor Drive Platform Control System Design Based on an Inverse System Method

摘要: Due to its simple mechanical structure and high motion stability, the H-shaped platform has been increasingly widely used in precision measuring, numerical control machining semiconductor packaging equipment, etc. The is normally driven by multiple (three) permanent magnet synchronous linear motors. main challenges for platform-control include between two motors Y direction as well total positioning error of mover, a combination position deviation X directions. To deal with above challenges, this paper proposes strategy based on inverse system method through state feedback dynamic decoupling thrust force. First, dynamics equations have deduced analysis coupling structure. Second, mathematical model relevant coordinate transformation dq-axis currents ABC-phase are analyzed. Third, after concept being explained, designed defining variables. Inverse compensates original nonlinear coupled into pseudo-linear decoupled system, which typical methods, like PID, can be adopted system. simulation built MATLAB/Simulink result shows that both small trajectory tracking error. Furthermore, program run NI controller fixed-loop-time free-loop-time modes, test average loop computation time needed rather small, makes it suitable real industrial applications. Overall, proves proposed new applications high-precision real-time performance requirements