Contact release capsule useful for chemical mechanical planarization slurry

摘要: The invention relates to a contact release capsule comprising particle, chemical payload, and polymer coating, wherein the particle is impregnated with payload held inside by coating until contacts surface shearing force removes allowing outside particle. useful in mechanical planarization slurries. Particularly, may comprise glycine silica nanoparticle coated polymer, dispersed an aqueous solution used copper process. Use of slurry for significantly improve efficiency, decrease unwanted etching corrosion, dispersion stability.