作者: Naruaki Shioji
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摘要: Oxygen and nitrogen contained in air is separated by an separator (15). The gas supplied to the optical path cover (11) of laser beam machine as a protective for bend mirrors (9). Further, or oxygen can be selectively head (7) assist gas. purity kept within predetermined range (94 99.5 %) on basis difference pressure between first conduit (47) supplying second (49) it preferable provide filter (19) removing dust from (33) oil mist (11).