Thin film metallic glasses as new MEMS materials
作者： S. Hata , J. Sakurai , A. Shimokohbe
DOI: 10.1109/MEMSYS.2005.1453971
关键词:
摘要: In order to apply the metallic glasses MEMS, Pd-based, Zr-based and Cu-based thin film (TFMGs) are fabricated successfully using an RF magnetron sputtering system. The TFMGs exhibit high strength elastic limit at room temperature low viscosity (under 1013 Pa.s) supercooled liquid region (SCLR). These characteristics desirable for utilization of as three dimensional (3D) micro-elastic-mechanisms. 3D microstructures realized by novel microforming methods SCLR. can be divided into two categories, namely 'deformation-heating method' 'heating-deformation method'. Using those new methods, MEMS made TFMG with shapes functions demonstrated.
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