Microstructure and electrical properties of iron oxide thin films deposited by spray pyrolysis

摘要: Abstract Microstructure and electrical properties of iron oxide Fe 2 O 3 thin films prepared by spray pyrolysis method have been experimentally characterized. The effect substrate temperature as well deposition time on the structural features (crystallite size microstrain) electric resistivity these has investigated. X-ray diffraction (XRD) scanning electron microscope (SEM) characterized structure study. results showed that with increasing bias film changed from amorphous to crystalline at same time. At a 350 °C low time, α-Fe appears almost in form. With rising crystallinity was improved. T sub >350 °C, well-crystallized rhombohedral phase obtained. Single order Voigt profile used determine microstructure parameters. measured value crystallite microstrain different temperatures times were studied. dark measurements room values 2.122×10 5  Ω cm for three orders magnitude lower than films.