Modelling and Diagnostics of Low Pressure Plasma Discharges

摘要: The presented thesis deals with various aspects of models for low pressure discharges. As well the theoretical background hydrodynamic plasma as comparison calculated data experimental results are discussed. In first part this work conservation equations derived from Boltzmann equation. Main focus is application to plasmas. Different model systems electrons and ions presented. question in which case simplified can be applied, treated numerical algorithms obtaining a solution second were used performing one-dimensional simulations. sensitivity dependence input parameters like momentum exchange frequencies was analysed. different compared qualitatively order get an estimate error introduced by using simple more stable systems. third applied simulate kinds inductively driven plasmas they semiconductor fabrication high density source. Calculated kind discharge values obtained Langmuir probe measurements. Theory experiment show very good agreement. final scaling laws geometry assemble set general reactor design rules. Examples presented, how performance optimised careful choice parameters. Also dependencies on external