Growth and properties of the CuInS2 thin films produced by glancing angle deposition

作者: F. Chaffar Akkari , M. Kanzari , B. Rezig

DOI: 10.1016/J.MSEC.2007.10.012

关键词:

摘要: Abstract We use the glancing angle deposition technique (GLAD) to grow CuInS2 thin films by a vacuum thermal method onto glass substrates. During deposition, substrate temperature was maintained at 200 °C. Due shadowing effect oblique can produce nanorods tilted toward incident flux. The evaporated atoms arrive growing interface fixed θ measured from normal. is rotated with rotational speed ω 0.033 rev s− 1. show that of this growth leads an improvement in optical properties films. Indeed high absorption coefficients (105–3.105 cm− 1) visible range and near-IR spectral are reached. In case absence rotation, scanning electron microscopy pictures structure resulting film consists nanocolumns progressively inclined towards evaporation source as increased. If rapid azimuthal rotation accompanies tilt, nanostructure composed array pillars normal substrate. surface morphology without presence secondary phases for higher angles (θ > 60°).

参考文章(9)
U. Störkel, M. Aggour, C.P. Murrell, H.J. Lewerenz, Electrochemical treatment of CuInS2 Thin Solid Films. ,vol. 387, pp. 182- 184 ,(2001) , 10.1016/S0040-6090(00)01812-5
D. Vick, L.J. Friedrich, S.K. Dew, M.J. Brett, K. Robbie, M. Seto, T. Smy, Self-shadowing and surface diffusion effects in obliquely deposited thin films Thin Solid Films. ,vol. 339, pp. 88- 94 ,(1999) , 10.1016/S0040-6090(98)01154-7
H. R. Philipp, H. Ehrenreich, Optical Properties of Semiconductors Physical Review. ,vol. 129, pp. 1550- 1560 ,(1963) , 10.1103/PHYSREV.129.1550
K. Chopra, Julius Klerrer, Thin film phenomena ,(1969)
K Robbie, JC Sit, MJ Brett, Advanced techniques for glancing angle deposition Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 16, pp. 1115- 1122 ,(1998) , 10.1116/1.590019
F. Chaffar Akkari, R. Brini, M. Kanzari, B. Rezig, High absorbing CuInS2 thin films growing by oblique angle incidence deposition in presence of thermal gradient Journal of Materials Science. ,vol. 40, pp. 5751- 5755 ,(2005) , 10.1007/S10853-005-1134-5
V.V. Kindyak, A.S. Kindyak, V.F. Gremenok, I.V. Bodnar, Yu.V. Rud', G.A. Medvedkin, Optical properties of laser-evaporated CuGaSe2 films near and above the fundamental absorption edge Thin Solid Films. ,vol. 250, pp. 33- 36 ,(1994) , 10.1016/0040-6090(94)90160-0
R.N. Tait, T. Smy, M.J. Brett, Modelling and characterization of columnar growth in evaporated films Thin Solid Films. ,vol. 226, pp. 196- 201 ,(1993) , 10.1016/0040-6090(93)90378-3
A.G. Dirks, H.J. Leamy, Columnar microstructure in vapor-deposited thin films Thin Solid Films. ,vol. 47, pp. 219- 233 ,(1977) , 10.1016/0040-6090(77)90037-2