Improved polymer-glass adhesion through micro-mechanical interlocking

摘要: Mechanical interlocking provides a simple and effective means of improving adhesion between dissimilar materials in micro-electro-mechanical systems (MEMS). Following successful implementation hybrid Si-polymer (Larsson, Syms Wojcik 2005 J. Micromech. Microeng. 15 2074–82), it was established that maximum interface strengthening does not necessarily rely on the presence overhang lobes. Instead, careful design lobe profile is advised order to balance opposing actions physical restraint pull-out obtain optimal strength. When an interlocked immersed aggressive liquid media, however, situation clearer: chemical bonds are degraded or completely destroyed only source restraint. Generating overhanging features Si substrates possible through reactive ion etching (RIE), but case glass, more problematic. A straightforward, robust process now described extends mechanical generic MEMS substrates, avoiding need for RIE. By using inexpensive processes such as electroplating wet etching, with generated glass substrates. Peel tests cured strips SU-8 confirm increase average peel strength by factor 3.5, compared peeled from smooth The method can readily be applied number including Si, providing low-cost route towards attaining interlocking.