Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto

摘要: Disclosed are capacitive micromechanical resonators optimized for high Q, low motional impedance, and large tuning range. Exemplary were fabricated using a HARPSS-on-SOI process, demonstrated quality factors up to 119000 in vacuum. For operating between 3 MHz 30 MHz, the lowest extracted impedance is 218 kΩ largest electrostatic coefficient −240 ppm/V2. The disclosed designs applicable at least 200 operation. An oscillator interface circuit comprising of trans-impedance amplifier an automatic bias generator providing temperature-compensating voltage also disclosed. Experiments show temperature drift reduction from 2800 ppm 39 over 100° C. Process compensation (DFM) resonators, having mass loading elements that allow generation closely spaced frequencies, coupled systems described.