Three-dimensional graphoepitaxial alignment resulting from solid-state dewetting of Au films on surfaces with monoperiodic topography

作者: Amanda L. Giermann , Carl V. Thompson

DOI: 10.1063/1.4740277

关键词:

摘要: Polycrystalline gold films were deposited and annealed on oxidized silicon with flat surfaces modified to have saw-tooth surface topography. Annealing led solid-sate dewetting form discrete islands. As-deposited had a strong (111) texture that became still stronger during dewetting. Films structures weak (100) [110] in-plane alignment along the grooves. This much more uniform It is proposed graphoepitaxial observed in both as-deposited result of surface-energy-driven grain growth.

参考文章(19)
L. S. Darken, Mechanism for the Graphoepitaxy of Electrodeposited Tin Journal of The Electrochemical Society. ,vol. 130, pp. 1274- 1282 ,(1983) , 10.1149/1.2119938
C. V. Thompson, Structure Evolution During Processing of Polycrystalline Films Annual Review of Materials Science. ,vol. 30, pp. 159- 190 ,(2000) , 10.1146/ANNUREV.MATSCI.30.1.159
D. W. Pashley, M. J. Stowell, M. H. Jacobs, T. J. Law, The growth and structure of gold and silver deposits formed by evaporation inside an electron microscope Philosophical Magazine. ,vol. 10, pp. 127- 158 ,(1964) , 10.1080/14786436408224212
D. J. Srolovitz, S. A. Safran, Capillary instabilities in thin films. I. Energetics Journal of Applied Physics. ,vol. 60, pp. 247- 254 ,(1986) , 10.1063/1.337689
D. J. Srolovitz, S. A. Safran, Capillary instabilities in thin films. II. Kinetics Journal of Applied Physics. ,vol. 60, pp. 255- 260 ,(1986) , 10.1063/1.337691
Zhengrong Shi, Solution growth of silicon on patterned amorphous SiO2 substrates Journal of Crystal Growth. ,vol. 135, pp. 273- 278 ,(1994) , 10.1016/0022-0248(94)90751-X
William W. Mullins, Flattening of a Nearly Plane Solid Surface due to Capillarity Journal of Applied Physics. ,vol. 30, pp. 77- 83 ,(1959) , 10.1063/1.1734979
A. L. Giermann, C. V. Thompson, Requirements for graphoepitaxial alignment through solid-state dewetting of Au films Journal of Applied Physics. ,vol. 109, pp. 083520- ,(2011) , 10.1063/1.3567302
Chee C. Wong, Henry I. Smith, C. V. Thompson, Surface‐energy‐driven secondary grain growth in thin Au films Applied Physics Letters. ,vol. 48, pp. 335- 337 ,(1986) , 10.1063/1.96543