Wire grid polarizer and manufacturing method thereof

作者: Jin Sung Kim , Ki Dong Lee , Seh Won Ahn , Joo Do Park , Sang Soo Yoon

DOI:

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摘要: A manufacturing method of a wire grid polarizer includes the steps of: preparing mold; sequentially forming metal foil and polymer on substrate; molding by using etching molded polymer, pattern; removing polymer.

参考文章(19)
Yoshiro Mikami, Yuji Mori, Kazuhiro Kuwabara, Method of manufacturing a thin-film pattern on a substrate ,(1992)
Frederick G Johnson, David M. Gill, Oliver S. King, Integrated optical circuit with dense planarized cladding layer ,(2003)
Yoshiki Sugeta, Fumitake Kaneko, Toshikazu Tachikawa, Method of forming fine patterns ,(2003)
Ping-Chen Chen, Chih-Ho Chiu, Yi-Chun Liu, Hui-Lung Kuo, Wire grid polarizer with double metal layers ,(2004)
David Wang, Nick John Viskovsky, Replicating a nanoscale pattern ,(1999)
Steven J. Choquette, Brigitte L. Ramos, Fabrication of embossed diffractive optics with reusable release agent ,(1996)
James C. Kim, Michael R. Krames, Nathan F. Gardner, Jonathan J. Wierer, John E. Epler, Semiconductor light emitting devices including in-plane light emitting layers ,(2004)