Optimization of multiple responses using principal component analysis and technique for order preference by similarity to ideal solution

摘要: Optimizing multi-response problems has become an increasingly relevant issue when more than one correlated product quality characteristic must be assessed simultaneously in a complicated manufacturing process. This study proposes novel optimization procedure for multiple responses based on Taguchi’s parameter design. The signal-to-noise (SN) ratio is initially used to assess the performance of each response. Principal component analysis (PCA) then conducted SN values obtain set uncorrelated components. direction determined corresponding variation mode chart. Finally, relative closeness ideal solution resulting from technique order preference by similarity (TOPSIS) as overall index (OPI) responses. Engineers can easily employ proposed optimal factor/level combination A case involving chemical-mechanical polishing copper (Cu-CMP) thin films integrated circuit manufacturer Taiwan also presented demonstrate effectiveness procedure.