Measurement of ac ion current from a corona ionizer using a Faraday cage

摘要: The use of ac ionizers operating at high frequency has become common in the semiconductor industry. mechanism by which equipment neutralizes charge, however, is not well understood, because induction interferes with measurement extremely small ion currents. In this work, we a Faraday cage that directly connected to an ionizer. At frequencies 1 and 10 Hz, measure distinct pulses current. amount transported charges increases both applied voltage ambient pressure. effect pressure more significant than voltage. higher chosen frequency, current changes from sinusoidal shape. By noting delay time kHz, average air velocity between needle was calculated. From dc corona measurements inside ionizer outlet, determine fraction charge compared total generated corona.