Reflectometer, spectrophometer, ellipsometer and polarimeter system with a super continuum laser-source of a beam of electromagnetism and improved detector system
作者： Jeremy A. Van Derslice , Martin M. Liphardt
DOI:
关键词:
摘要: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over range about 400-about 2500 nm, stage for supporting sample detector radiation, wherein the provides beam which interacts with sample, system comprises functional combinations gratings and/or combination dichroic splitter-prisms, themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to detectors that are well suited detect them.
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