Ohmic contacts to Gallium Nitride materials
作者： Giuseppe Greco , Ferdinando Iucolano , Fabrizio Roccaforte
DOI: 10.1016/J.APSUSC.2016.04.016
关键词:
摘要: In this review article, a comprehensive study of the mechanisms of Ohmic contact formation on GaN-based materials is presented. After a brief introduction on the physics of Ohmic …
harvard.edu
sci-hub.se 参考文章(160)
Frank R De Boer, W Mattens, R Boom, AR Miedema, AK Niessen, Cohesion in Metals: Transition Metal Alloys ,(1989)
V Rajagopal Reddy, CK Ramesh, None, Low-resistance ohmic contacts to N-type GaN using Ti/Al/Re/Au multilayer scheme Journal of Optoelectronics and Advanced Materials. ,vol. 6, pp. 177- 182 ,(2004)
D. Qiao, Z. F. Guan, J. Carlton, S. S. Lau, G. J. Sullivan, Low resistance ohmic contacts on AlGaN/GaN structures using implantation and the “advancing” Al/Ti metallization Applied Physics Letters. ,vol. 74, pp. 2652- 2654 ,(1999) , 10.1063/1.123927
G. Vanko, T. Lalinský, Ž. Mozolová, J. Liday, P. Vogrinčič, A. Vincze, F. Uherek, Š. Haščík, I. Kostič, Nb-Ti/Al/Ni/Au based ohmic contacts to AlGaN/GaN Vacuum. ,vol. 82, pp. 193- 196 ,(2007) , 10.1016/J.VACUUM.2007.07.020
Jun Ho Son, Yang Hee Song, Hak Ki Yu, Jong-Lam Lee, Effects of Ni cladding layers on suppression of Ag agglomeration in Ag-based Ohmic contacts on p-GaN Applied Physics Letters. ,vol. 95, pp. 062108- ,(2009) , 10.1063/1.3206742
J. Narayan, H. Wang, T.-H. Oh, H. K. Choi, J. C. C. Fan, Formation of epitaxial Au/Ni/Au ohmic contacts to p-GaN Applied Physics Letters. ,vol. 81, pp. 3978- 3980 ,(2002) , 10.1063/1.1524032
Michele Piazza, Christian Dua, Mourad Oualli, Erwan Morvan, Dominique Carisetti, Frédéric Wyczisk, Degradation of TiAlNiAu as ohmic contact metal for GaN HEMTs Microelectronics Reliability. ,vol. 49, pp. 1222- 1225 ,(2009) , 10.1016/J.MICROREL.2009.06.043
G Greco, F Giannazzo, F Iucolano, R Lo Nigro, F Roccaforte, None, Nanoscale structural and electrical evolution of Ta- and Ti-based contacts on AlGaN/GaN heterostructures Journal of Applied Physics. ,vol. 114, pp. 083717- ,(2013) , 10.1063/1.4819400
F.A. Padovani, R. Stratton, Field and thermionic-field emission in Schottky barriers Solid-state Electronics. ,vol. 9, pp. 695- 707 ,(1966) , 10.1016/0038-1101(66)90097-9
Changzhi Lu, Hongnai Chen, Xiaoliang Lv, Xuesong Xie, S. Noor Mohammad, Temperature and doping-dependent resistivity of Ti/Au/Pd/Au multilayer ohmic contact to n-GaN Journal of Applied Physics. ,vol. 91, pp. 9218- 9224 ,(2002) , 10.1063/1.1471390