AUTOMATED PARALLEL HIGH-SPEED ATOMIC FORCE MICROSCOPY

摘要: An expandable system has been developed to operate multiple probes for the atomic force microscope in parallel at high speeds. The combined improvements from parallelism and enhanced tip speed this represent an increase throughput by over two orders of magnitude. A modular cantilever design replicated produce array 50 cantilevers with a 200 μm pitch. This contains dedicated integrated sensor actuator where cells can be repeated indefinitely. Electrical shielding within virtually eliminates coupling between actuators sensors. reduced simplifies control electronics, facilitating computer automate high-speed arrays. automated applied four cantilevers, 20 kHz bandwidth noise level less than A. For typical samples, allows us scan 4 mm/s.