3D position detection with an FIB-SEM dual beam system

摘要: The handling and characterization of nanoobjects has gained in importance recent years. scanning electron microscope (SEM) combination with a focus ion beam (FIB) is commonly used. These applications often need the positions involved objects. position calculation must be precise able to offer results real time. This paper introduces new 3D detection approach for FIB-SEM dual systems. FIB SEM are combined powerful stereo system accuracy lower nm range. used low powers avoid unintended abrasion. In addition proof concept an overview future challenges given.