Spatially-resolved valence-electron energy-loss spectroscopy of Zr-oxide and Zr-silicate films
作者： Nobuyuki Ikarashi , Kenzo Manabe
DOI: 10.1063/1.1483130
关键词:
摘要: We examined electronic structures in Zr-oxide (ZrO2) and Zr-silicate (ZrxSi1−xO2) films deposited on Si substrates by using valence-electron energy-loss spectroscopy combined with scanning transmission electron microscopy (the probe diameter was about 0.3 nm). Our analysis indicated that both excitations ZrO2 SiO2 occurred the ZrxSi1−xO2 films. Therefore, band gaps should be dominated an energy gap between O 2p Zr 4d states.
scitation.org
harvard.edu
aip.org 
sci-hub.se 参考文章(12)
John R. Jameson, Walter Harrison, P. B. Griffin, Tight-binding model and electronic structure of tetrahedral zirconium silicate Journal of Applied Physics. ,vol. 90, pp. 4570- 4577 ,(2001) , 10.1063/1.1406972
P. Moreau, N. Brun, C. A. Walsh, C. Colliex, A. Howie, Relativistic effects in electron-energy-loss-spectroscopy observations of theSi/SiO2interface plasmon peak Physical Review B. ,vol. 56, pp. 6774- 6781 ,(1997) , 10.1103/PHYSREVB.56.6774
Ray F. Egerton, Dale E. Newbury, Electron Energy-Loss Spectroscopy in the Electron Microscope ,(1995)
G. D. Wilk, R. M. Wallace, J. M. Anthony, Hafnium and zirconium silicates for advanced gate dielectrics Journal of Applied Physics. ,vol. 87, pp. 484- 492 ,(2000) , 10.1063/1.371888
G. Marletta, S. Pignataro, Electronic excitations in solid ZrO2 from reflection EELS and ESCA multipeak structures Chemical Physics Letters. ,vol. 124, pp. 414- 419 ,(1986) , 10.1016/0009-2614(86)85045-X
M. Copel, M. Gribelyuk, E. Gusev, Structure and stability of ultrathin zirconium oxide layers on Si(001) Applied Physics Letters. ,vol. 76, pp. 436- 438 ,(2000) , 10.1063/1.125779
L.A.J. Garvie, P. Rez, J.R. Alvarez, P.R. Buseck, Interband transitions of crystalline and amorphous SiO2: An electron energy-loss spectroscopy (EELS) study of the low-loss region Solid State Communications. ,vol. 106, pp. 303- 307 ,(1998) , 10.1016/S0038-1098(98)00021-0
R. H. French, S. J. Glass, F. S. Ohuchi, Y. -N. Xu, W. Y. Ching, Experimental and theoretical determination of the electronic structure and optical properties of three phases of {ZrO2} Physical Review B. ,vol. 49, pp. 5133- 5142 ,(1994) , 10.1103/PHYSREVB.49.5133
Gregory R. Corallo, Douglas A. Asbury, Richard E. Gilbert, Gar B. Hoflund, Electron-energy-loss study of clean and oxygen-exposed polycrystalline zirconium. Physical Review B. ,vol. 35, pp. 9451- 9459 ,(1987) , 10.1103/PHYSREVB.35.9451
David A. Muller, Glen D. Wilk, Atomic scale measurements of the interfacial electronic structure and chemistry of zirconium silicate gate dielectrics Applied Physics Letters. ,vol. 79, pp. 4195- 4197 ,(2001) , 10.1063/1.1426268