Automatic storage unit and automatic storing method
作者： Keiichi Ando
DOI:
关键词:
摘要: In an automatic storage system and storing method for automatically take in out a container box 1 accommodating therein wafer carrier 6 , take-in port take-out of unit 8 are unified to one common inlet/outlet 15 control is conducted the effect that when taken on basis take-in/take-out schedule empty ceaselessly left at . Thus, operation can be smoothly with no necessity enlarging congestion conveying 6.
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