Localized Corrosion of Sputtered Aluminum and Al‐0.5% Cu Alloy Thin Films in Aqueous HF Solution I . Corrosion Phenomena

作者: J. R. Scully , R. P. Frankenthal , K. J. Hanson , D. J. Siconolfi , J. D. Sinclair

DOI: 10.1149/1.2086675

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