Advances in Deposition of Transition‐Metal Oxides from Metal Enolates

作者: Heinrich Lang , David Adner , Colin Georgi

DOI: 10.1002/9780470682531.PAT0910

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摘要: This chapter is an update of part a review published by our group elsewhere in Patai's Series; addition, this volume, chapters present the recent advances deposition metals and oxides main-group rare-earth elements, all derived from metal enolates. Metal are essential as common inorganic crude materials, possessing manifold portfolio applications because their singular physical chemical properties. Metal formed straight vaporization oxide sources, evaporation oxidizing atmosphere, or via wet chemistry, for example, sol-gel process. Their industrial use includes protective coatings, electrical insulator gate oxides, transparent conductors, piezoelectric battery electrode electrochromic devices, optical filters, laser-active media, wide-bandgap semiconductors, solar absorbers, many others. Keywords: metal enolates; metal oxides; mixed oxides; metal β-diketonates; main-group elements; rare earth elements; deposition; gas-phase; wet chemistry

参考文章(198)
C. Bright, Transparent conductive thin films Optical Thin Films and Coatings#R##N#From Materials to Applications. pp. 741- 788 ,(2013) , 10.1533/9780857097316.4.741
H. Angusmacleod, Recent developments in deposition techniques for optical thin films and coatings Optical Thin Films and Coatings#R##N#From Materials to Applications. pp. 3- 25 ,(2013) , 10.1533/9780857097316.1.3
Michael E. A. Warwick, Giorgio Carraro, Alberto Gasparotto, Chiara Maccato, Davide Barreca, Cinzia Sada, Elza Bontempi, Yakup Gönüllü, Sanjay Mathur, Interplay of thickness and photoelectrochemical properties in nanostructured α‐Fe2O3 thin films Physica Status Solidi (a). ,vol. 212, pp. 1501- 1507 ,(2015) , 10.1002/PSSA.201532366
Daniel Peeters, Giorgio Carraro, Chiara Maccato, Harish Parala, Alberto Gasparotto, Davide Barreca, Cinzia Sada, Konstantin Kartaschew, Martina Havenith, Detlef Rogalla, Hans-Werner Becker, Anjana Devi, Tailoring iron(III) oxide nanomorphology by chemical vapor deposition: Growth and characterization Physica Status Solidi (a). ,vol. 211, pp. 316- 322 ,(2014) , 10.1002/PSSA.201330079
Davide Barreca, Giorgio Carraro, Daniel Peeters, Alberto Gasparotto, Chiara Maccato, Wilhelmus M. M. Kessels, Valentino Longo, Francesca Rossi, Elza Bontempi, Cinzia Sada, Anjana Devi, Surface Decoration of ϵ-Fe2O3 Nanorods by CuO Via a Two-Step CVD/Sputtering Approach** Chemical Vapor Deposition. ,vol. 20, pp. 313- 319 ,(2014) , 10.1002/CVDE.201407108
F. Kapteijn, A.D. Vanlangeveld, J.A. Moulijn, A. Andreini, M.A. Vuurman, A.M. Turek, J.M. Jehng, I.E. Wachs, Alumina-Supported Manganese Oxide Catalysts: I. Characterization: Effect of Precursor and Loading Journal of Catalysis. ,vol. 150, pp. 94- 104 ,(1994) , 10.1006/JCAT.1994.1325
Fabrizio Roccaforte, Patrick Fiorenza, Giuseppe Greco, Raffaella Lo Nigro, Filippo Giannazzo, Alfonso Patti, Mario Saggio, Challenges for energy efficient wide band gap semiconductor power devices Physica Status Solidi (a). ,vol. 211, pp. 2063- 2071 ,(2014) , 10.1002/PSSA.201300558
Thomas Waechtler, Nina Roth, Robert Mothes, Steffen Schulze, Stefan E. Schulz, Thomas Gessner, Heinrich Lang, Michael Hietschold, Copper Oxide ALD from a Cu(I) -Diketonate: Detailed Growth Studies on SiO2 and TaN 216th ECS Meeting. ,vol. 25, pp. 277- 287 ,(2009) , 10.1149/1.3205062
Ksenia V. Zherikova, Natalia B. Morozova, Ludmila N. Zelenina, S. V. Sysoev, Tamara P. Chusova, I. K. Igumenov, Thermal properties of hafnium(IV) and zirconium(IV) β-diketonates Journal of Thermal Analysis and Calorimetry. ,vol. 92, pp. 729- 734 ,(2008) , 10.1007/S10973-008-9027-X
A. Azens, C. Granqvist, Electrochromic Smart Windows: Energy Efficiency and Device Aspects Journal of Solid State Electrochemistry. ,vol. 7, pp. 64- 68 ,(2003) , 10.1007/S10008-002-0313-4